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We offer flexible process tools and leading-edge processes for the precise, controllable, repeatable etching, deposition and growth of micro- and nano-structures.
Systems provide process solutions for the micro- and nanometre engineering of materials for MEMS, semiconductor, optoelectronics, HBLED & microfluidics, and many applications in micro- and nanotechnology.
- Core technologies:
- Plasma Etch & Deposition
- Atomic Layer Deposition (ALD)
- Ion Beam Etch & Deposition
- Deep Silicon Etch
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