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Ritsumeikan University
1-1-1, Noji-higashi
Kusatsu, SHIGA 525-8577 JAPAN
phone: +81-77-561-2863
www.ritsumei.ac.jp/eng
Ritsumeikan University, Japan, has established and developed MEMS research activities since 1993. At the early stage, we studied X-ray lithography for LIGA by using our own synchrotron radiation facility. Recently, we focus on MEMS for biomedical application based on experiences for more than 20 years in MEMS field. In our showcase at Transducers2015, you can find our recent attractive activities.
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